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Academic Report: Piezoelectric thin films for flexible and wearable acoustic wave sensing and microfluidic devices


主题:Piezoelectric thin films for flexible and wearable acoustic wave sensing and microfluidic devices

时间:2018-09-21   9:30


报告人:Prof. Fu Yongqing, University of Northumbria

Speaker Bio

Dr. Fu Yongqing is a professor in the Faculty of Engineering and Environment, University of Northumbria at Newcastle, UK. He was a Reader in Thin Film Centre in University of West of Scotland, Glasgow, UK, and a lecturer in Heriot-Watt University, Edinburgh, UK. He obtained his PhD degree from Nanyang Technological University, Singapore, and then worked as a Research Fellow in Singapore-Massachusetts Institute of Technology Alliance, and a Research Associate in University of Cambridge. He has extensive experience in design of smart thin film/materials, biomedical microdevices, lab-on-chip, micromechanics, MEMS, nanotechnology, sensors and microfluidics. He has established a worldwide reputation from his pioneer research work on shape memory films, piezoelectric thin films, nanostructured composite/films for applications in MEMS, sensing and energy applications. His research has been funded by Engineering and Physics Science Research Council (EPSRC), Royal Society, Royal Academy of Engineering, Carnegie Trust, UK Fluidic Network, Royal Society of Edinburgh, Scottish Government, Scottish Union Physics Alliance (SUPA), Nuffield Foundation, Innovate UK/Knowledge Transfer Partnership (KTP), AWE-UK, EU-Erasmus, Scottish Sensor System Centre/CENSIS, Scottish Funding Council and National Science Foundation of China, etc.

He published over 330 science citation index (SCI) journal papers (including Progress in Materials Science, Nature Communications, Nano Energy, Chemstry of Materials, and Nano Letters), and his current SCI H-index is 41 with over 6800 citations. His Google scholar H-index is 50, with over 8K citations. He is associate editor/editorial board members for six international journals including Scientific Report. He is regular journal paper reviewers for more than 30 journals, and has co-organized 12 international conferences worldwide, and co-edited six special issues for journals including Thin Solid Films, Nanoscience and Nanotechnology Letter, Sensors, Polymers, Applied Science, and Surface and Coating Technology. He is now served as the Regional President of International Thin Film Society, and Regional Secretary of Taiwan Thin Film Society, and Committee Member of Chinese Society of Heat Treatment and Metallurgy/Chinese Society of Surface Engineering. 


Thin film acoustic techniques have been used to fabricate surface acoustic wave (SAW) and film bulk acoustic wave (FBAR) applications, which have been used for sample preparation (sorting, mixing, pumping, nebulization and dispensing) as well as gas sensing and bio-sensing. This talk will focus on acoustic wave devices fabricated using piezoelectric thin films (mainly ZnO and AlN) for acoustic wave sensing and microfluidic applications. Engineering of piezoelectric films and their functional properties are analyzed. The fabrication process and characterization of integrated acoustic wave devices using sputtered thin films on various substrates were discussed, but more focusing on recent work of high performance devices achieved on polymer and metallic foils. The thin film based flexible SAW devices have the potential to be integrated with other microfluidic and sensing technology on a variety of substrates including CMOS integrated circuits to make novel lab-on-chip for bio-detection for wearable and flexible applications.

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