Main research directions：
o Lithography immersion system
o Fluid Components for Micro-Nano Fabrication
o Ultra-precision machining and measuring technology
o Micro-Nano device and system integration technology
o Human-Computer Interaction and sensor network
o Micro-Nano sensor and drive application technology
o MEMS and micro-Nano manufacturing Technology
o Sensors and smart/intelligent instruments
o New precision pneumatic components and systems
Director: Professor Liu Tao
Deputy Director: Professor Xie Jin,
Associate Professor Liu Hao
Tel: 0571-87951314 (to 6221)
E-mail: micronano@zju.edu.cn
The Micro-Nano Technology and Precision Engineering Institute was established in 2017 by the teachers from the Institute of Mechanical and Electronic Control Engineering, College of Mechanical Engineering. It is a new research institute engaging in research related to micro-Nano fabrication and precision machinery.It is also one of the major components of the State Key Laboratory of Fluid Power and Electromechanical Systems, subordinate to mechanical and electronic engineering, the National key discipline. Its first-level subject, mechanical engineering, was selected as the national Double World-class construction disciplines。
The institute now has a faculty of 5 professors, 1 research fellow, 3 associate professors, 1 lecturer and 2 Postdoctor . At present, more than 90 ph. D. and master undergraduates are engaging in research on related topics here.
