On the afternoon of January 13, professor Zhu Yi, the director of Research Base of Fine Mechanics and Control of Tsinghua University, held the lecture on on the development trend and research progress in IC manufacturing technology. Fu Xin, deputy director of Mechanical Engineering Department, Li Jinlin, Party Secretary of Mechanical Engineering Department, and about 200 students took part in the talk.
Beginning with the basic principles of semiconductor technology, professor Zhu elaborated IC manufacturing and packaging technology, process and key equipments. He vividly demonstrated the basic process of chip manufacturing process from the exposure, etching, packaging, slicing, to bonding in the form of animation. He also introduced the key technology of IC manufacturing equipments such as Lithography, etching machines, ion implantation machine and chemical mechanical polishing equipments, the status and the development trend and the challenge in IC manufacturing technology. In the end of the talk, Zhu communicated with the students and answered the questions patiently.